Logo Made in Germany SEMICON Japan 2017

InnoLas Semiconductor GmbH

Booth number: 1609-5

About us

The InnoLas Semiconductor GmbH is a German based company which is focussed on high quality wafer marking as well as wafer sorting systems for the semiconductor industry. For more than 20 years it is our core business to devlop and produce individual customized solutions that fit the needs of our customers perfectly.

For all of our machines we attach a high importance in the selection of our sub components which must have the highest quality you can find on the market. The assembling and comissioning of every machine is done by highly skilled and experianced employees which guarantees our high quality promise.

In addition we keep an eye on very high cleanliness of our machines which is the demand of our customers. That’s why all of our machines are assembled and commissioned in our own cleanroom ISO6 (ISO 14644-1).

It’s our aim to provide high quality and reliable wafer marking and wafer sorting solutions with an excellent price-performance ratio. The high number of regular customers aspects in our favour.

Products and services

IL C3000 Wafer Marking System

IL C3000 Wafer Marking System

• 300mm Wafer
• Particle free softmark process
• Class 1 minienvironment
• High throughput up to 180 wafer per hour
• Vacuum and Edge Grip Handling

IL2000 Wafer Marking System

IL2000 Wafer Marking System

• 200mm Wafer
• Edge Grip or Vacuum handling
• Paticle Free Softmark laser process
• Up to 200 wafer per hour


InnoLas Semiconductor GmbH
Justus-von-Liebig-Ring 8
82152 Krailling

Phone: +49 89 8993601300

Thomas Roelz
Sales Manager
Phone: +49 89 8993601305

Lumonics K.K.
2-15-10 Shin-Yokohama, Kohoku-Ku
222-0033 Yokohama-Shi, Kanagawa

Phone: +81 45 4712777

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