Logo Made in Germany SEMICON Japan 2018

Integrated Dynamics Engineering GmbH

Booth number: 1912

About us

IDE - technology leader in vibration isolation, wafer handling and EMI cancellation

Integrated Dynamics Engineering (IDE) is a global market leader in developing and manufacturing environmental control systems, such as active and passive vibration isolation, active compensation for magnetic interference and acoustic shielding.

IDE’s solutions are established and proven even for the most demanding applications in lithography, metrology, research and medical technology.

Furthermore IDE is a major supplier for wafer and mask handling robots, customized tool platforms and EFEMs for semiconductor OEMs. IDE’s product portfolio comprises a broad variety of solutions for the most ambitious industries in the fields of metrology and instrumentation.

Over 20 years of experience make IDE your reliable and competent solution provider. IDE analyzes environments with respect to application specific requirements, provides profound consulting and offers ideal solutions.

Products and services

Vibration Isolation

IDE leads in vibration isolation. With the largest number of systems installed worldwide and the most advanced technologies being developed year after year, IDE continuously maintains its position as global technological leader in active and passive vibration isolation. IDE’s product portfolio covers the entire range, such as

- Passive isolation modules
- Semi-active isolation modules with self-leveling
- Active isolation modules in soft mount or hard mount layout, cutting-edge floor and stage feed forward control

EMI Cancellation

IDE’s brand-new MK5 system provides the most powerful and versatile field attenuation; robust and versatile sensor design, large bandwidth and very low noise level make it the perfect solution for all fields of application.
MK5 - EMI Active Compensation for SEM and TEM Microscopy

MK5 - EMI Active Compensation for SEM and TEM Microscopy

• Most powerful and versatile field attenuation on the market (up to 55 dB)
• Excellent dependability due to comprehensive performance diagnosis
• Easy operation with sophisticated auto-tuning and touch screen control
• Extensive adaptability for demanding applications and strong disturbances
• Flexible sensor positioning due to compact design and large allowable field

ATAN - Active Vibration Isolation System

ATAN - Active Vibration Isolation System

Active Vibration Isolation Modules supporting the highest throughput and productivity requirements for optical and e-beam inspection and metrology equipment.

Baladi - Semi-active and full active vibration isolation solution

Baladi - Semi-active and full active vibration isolation solution

Baladi supports mid-range and high-end semiconductor manufacturing equipment with their needs of high productivity, fast settling time and lowest vibration levels. The new Baladi product range closes that gap between classic passive air-spring isolation and state of the art active vibration isolation.

News & Innovations

How IDE satisfies demanding vibration site requirements in semicon fab cleanrooms 

IDE installed TAW isolators on a number of unique mask qualification systems for the world's largest semiconductor chip manufacturer in recent months. Here, the IDE TAW systems met, without compromise, all the of the customer’s stringent X, Y, and Z requirements. In the past years, several dis...| » Further reading 

New ATAN focuses on the 11nm Technology Node 

IDE’s ATAN active vibration isolation modules considered the ideal solution for high-throughput semiconductor manufacturing and metrology equipment. Continuing a decades-long tradition of developing innovative active vibration isolation solutions for the global semiconductor and metrology indus...| » Further reading 


Integrated Dynamics Engineering GmbH
Hermannstr. 9 – 13
65479 Raunheim

Phone: +49 6142 94000
Fax: +49 6142 940099

Roland Kappel
Phone: +49 172 6999082

Integrated Dynamics Engineering GmbH
2-14-5 Osakaue, Hinoshi
Tokyo 191-0061

Phone: +81 42 5817588

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