MK5 - EMI Active Compensation for SEM and TEM Microscopy
• Most powerful and versatile field attenuation on the market (up to 55 dB)
• Excellent dependability due to comprehensive performance diagnosis
• Easy operation with sophisticated auto-tuning and touch screen control
• Extensive adaptability for demanding applications and strong disturbances
• Flexible sensor positioning due to compact design and large allowable field
ATAN - Active Vibration Isolation System
Active Vibration Isolation Modules supporting the highest throughput and productivity requirements for optical and e-beam inspection and metrology equipment.
Baladi - Semi-active and full active vibration isolation solution
Baladi supports mid-range and high-end semiconductor manufacturing equipment with their needs of high productivity, fast settling time and lowest vibration levels. The new Baladi product range closes that gap between classic passive air-spring isolation and state of the art active vibration isolation.
IDE installed TAW isolators on a number of unique mask qualification systems for the world's largest semiconductor chip manufacturer in recent months. Here, the IDE TAW systems met, without compromise, all the of the customer’s stringent X, Y, and Z requirements. In the past years, several dis...| » Further reading
IDE’s ATAN active vibration isolation modules considered the ideal solution for high-throughput semiconductor manufacturing and metrology equipment. Continuing a decades-long tradition of developing innovative active vibration isolation solutions for the global semiconductor and metrology indus...| » Further reading
Integrated Dynamics Engineering GmbH
Hermannstr. 9 – 13
Phone: +49 6142 94000
Fax: +49 6142 940099
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