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News & Innovations

News and innovations published by German exhibitors

A Combination Of Different Exhaust Gas Purification Processes

Industrial exhaust gas purification is a vast area. There are many different technologies and facilities for the effective treatment of pollutant emissions. This is primarily due to the high heterogeneity of exhaust gases from different industrial processes. Depending on the application, the...

Exhibitor: centrotherm clean solutions GmbH & Co. KG

PFC-Gas Treatment

Climate changing gases such as SF6, CF4 or NF3 are employed in many manufacturing processes. These gases are used to clean the chambers in semiconductor and photovoltaic processes. Often, insulating gas is used for the protection of sensitive electronics. Once emitted in the nature, these gases...

Exhibitor: centrotherm clean solutions GmbH & Co. KG

How IDE satisfies demanding vibration site requirements in semicon fab cleanrooms

IDE installed TAW isolators on a number of unique mask qualification systems for the world's largest semiconductor chip manufacturer in recent months. Here, the IDE TAW systems met, without compromise, all the of the customer’s stringent X, Y, and Z requirements. In the past years, several...

Exhibitor: Integrated Dynamics Engineering GmbH

New ATAN focuses on the 11nm Technology Node

IDE’s ATAN active vibration isolation modules considered the ideal solution for high-throughput semiconductor manufacturing and metrology equipment. Continuing a decades-long tradition of developing innovative active vibration isolation solutions for the global semiconductor and metrology...

Exhibitor: Integrated Dynamics Engineering GmbH

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