About us

MueTec offers a comprehensive range of optical inspection systems for the semiconductor and MEMS industry, including:

  • Infrared (IR) inspection and metrology for MEMS and Wafer
  • Macro Defect Inspection: recipe-less with 200 wph parallel wafer back side and front side or blank inspection
  • AOI (Automated Optical Inspection) tools with different automation levels
  • Flexible combination of CD and Overlay metrology with film thickness measurement and defect inspection and review in one tool

We are fast and flexible to tailor our solutions to your individual needs. In more than 25 years, MueTec has installed hundreds of systems around the world that provide proof of highest performance and quality standards.

Products and services

IRIS Product Family: 200mm/300mm Infrared inspection and metrology system for MEMS, Power Semiconductor and LED. Applications include MEMS sealing inspection (glass frit and eutectic bonding), top-to-bottom overlay, MEMS device inspection and critical dimension measurement. MT1000 Product Family: high troughput macro defect inspection system for parallel wafer frontside and backside inspection. No recipe required.

MT8000 Series

Metrology and Inspection System for 300mm and 200mm wafer, MEMS and masks. The MT8000 series features the following applications: CD, Overlay and Film Thickness measurement and Defect Inspection.


The MT1000 is a Macro Defect Inspection system that features recipe-less, simultaneous frontside and backside defect inspection at a throughput of 200 wph.

MueTec GmbH
Hans-Bunte-Str. 5
80992 München

Phone: +49 89 15001690
Fax: +49 89 150016960
Internet: www.muetec.com
E-mail: Send message

Contact person

Wolfgang Rausch
Head of Sales and Marketing
Phone: +49 151 14080214
E-mail: Send message

MueTec Ltd. Taiwan
No. 229, 8F - 7. Fu-Xing 2nd Road
30271 ChuBei, Hsinchu City

Phone: +886 3 5501025
Fax: +886 3 5501092
Internet: www.muetec.com
E-mail: Send message

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