Key Visual SEMICON Japan 2018
Logo SEMICON Japan 2018

German Pavilion at
SEMICON Japan 2018

What is German Pavilion?

12 – 14 December 2018 – Tokyo, Japan
Semiconductor Equipment & Materials Exhibition

News & Innovations

News and innovations published by German exhibitors

New ATAN focuses on the 11nm Technology Node

IDE’s ATAN active vibration isolation modules considered the ideal solution for high-throughput semiconductor manufacturing and metrology equipment. Continuing a decades-long tradition of developing innovative active vibration isolation solutions for the global semiconductor and metrology industries, Integrated Dynamics Engineering (IDE) is…

Exhibitor: Integrated Dynamics Engineering GmbH

Further reading

How IDE satisfies demanding vibration site requirements in semicon fab cleanrooms

IDE installed TAW isolators on a number of unique mask qualification systems for the world's largest semiconductor chip manufacturer in recent months. Here, the IDE TAW systems met, without compromise, all the of the customer’s stringent X, Y, and Z…

Exhibitor: Integrated Dynamics Engineering GmbH

Further reading

PFC-Gas Treatment

Climate changing gases such as SF6, CF4 or NF3 are employed in many manufacturing processes. These gases are used to clean the chambers in semiconductor and photovoltaic processes. Often, insulating gas is used for the protection of sensitive electronics. Once…

Exhibitor: centrotherm clean solutions GmbH & Co. KG

Further reading

A Combination Of Different Exhaust Gas Purification Processes

Industrial exhaust gas purification is a vast area. There are many different technologies and facilities for the effective treatment of pollutant emissions. This is primarily due to the high heterogeneity of exhaust gases from different industrial processes. Depending on the…

Exhibitor: centrotherm clean solutions GmbH & Co. KG

Further reading