MueTec Automatisierte Mikroskopie und Meßtechnik GmbH
About us
MueTec is an established Metrology & Inspection tool provider in the Semiconductor Industry. Our proven optical
technologies are the foundation for fast, reliable and accurate measurements matching today’s customer demands. From high throughput to detailed inspection we offer a vast number of capabilities which allow our customers to improve their yield, to better understand their production process and address the right action for better production output. Being close to our customer isn't just a statement for us, it's our daily life and we are proud to call our customers the main player in the market. Our dynamic and customer-orientated workforce is tailored to work closely with our customers and manage any specifics needs they might have. With over 400 tools installed worldwide we are happy to serve our worldwide customers with our local organizations.
Address
Hans-Bunte-Straße 5
80992 Moosach
Germany
E-mail: joerg.collrep@muetec.com
Phone: +49 170 7861796
Internet: muetec.com
Contact person:
David Lin
Technical Sales Engineer
E-mail: david.lin@muetec.com
Joerg Collrep
Global Head of Sales
E-mail: joerg.collrep@muetec.com
Hidaka Mamoru
President & Ceo
E-mail: hidaka_m@techno-lead.co.jp
Products & Services
- Open & closed frame Metrology and Inspection Tools, manual, semi-automatic, fully automatic for wafers and masks
- Metrology: MT2010, MT270UV, MT3000 VIS/UV/IR, IRIS2100, DaVinci 200 or 300VIS/UV/IR, DaVinci 300i²OVL, DaVinci 270UV
- Inspection: SPECTOR A/M/5500, IRIS2100, MT3000 VIS/UV, MT5500, ARGOS, Rembrandt, SENTINEL
- Open Frame Tools 3" - 14"
— Closed Frame Tools 150-300 mm, Loading: OC, SMIF, FOUP
— various sensitivity depending on tool and measurement technology & application
- Global Sales & Service Organization
DaVinci i²OVL
The 5. tool-generation of the DaVinci metrology system is developed for high speed Single purpose overlay measurement targeting down to the 28nm node technology field. With the new Stage hardware and optimized algorithm the G5 system is state of the art for new nanometer structured wafer metrology through Iow positioning error and high throughput.
MT3000
The MT3000+ is developed by MueTec and presents the new generation from our existing and market established MT3000 metrology System. High throughput with increased measurement precision in overlay and CD is the application field of the MT3000. With the new high-speed Stage and the precise piezo z-drive we achieve higher performance and throughput as with current measurement systems. The MT3000 is designed for production environment with requirement on high flexibility combined with fully automated operation.
ARGOS 300
Automatic and fully enclosed up to 12" High Throughput Wafer Defect Inspection System. The simultaneous frontside and backside inspection makes the tool suitable for a high-volume production environment. The Tool is optimized for high throughput, fully automated substrate loading and simplified operator control. The recipe less operation enables the user to scan and detect defects on a variety of different process layers automatically without the need of creating layer specific recipes.
ARGOS 200HT
Automatic and fully enclosed 6" and 8" High Throughput Wafer Defect Inspection System. The simultaneous frontside and backside inspection makes the tool suitable for a high-volume production environment. The Tool is optimized for high throughput, small footprint and simplified operator control. The recipe less operation enables the user to scan and detect defects on a variety of different process layers automatically without the need of creating layer specific recipes.
SPECTOR 5500
Automatic and fully enclosed Mask Defect Inspection System With robot handling from masks by up to 2 pod or cassette stations. Automatic inspection based on die-to-die approach to detect statistical failures and automatically decide if the photomask is good, requires cleaning or needs to be replaced. The usage of masks Size up to 14" is feasible.
DaVinci 300IR
The DaVinci 300IR presents MueTec leading product for infrared metrology and inspection focused on MEMS- Technology. Combined With visible light option for the systems bring benefits for in-line process control as all-in-one system. Our 20-year experience in IR systems is focused on the DaVinci 3001R and enables the customer to use for a variety of different applications.
