Based on the proven DAS plasma-enhanced catalytic technology, ALCEA is a highly integrated and highly efficient secondary abatement system for use downstream of any NOx-generating waste gas treatment units. The process uses plasma technology to generate Reactive Oxygen Species (ROS), which then serve as the basis for the catalytic reactions. 

Dependent on prior treatment steps ALCEA achieves exceptional NOx reduction efficiency of up to 95% with minimal energy consumption. Through the integration of the catalyst unit in the exhaust ducts ALCEA has virtually no footprint. The technical system can be easily fitted into the subfab’s exhaust duct system.