In our RTPs you have the option to process silicon wafers of different sizes, or insert a graphite susceptor for processing a high range of various parts. Typical applications would be: 

• soar wafer / photovoltaic applications

• crystallization & densification of thin films

• oxidation / reduction processes at high purity

• activation & defect annealing

• rapid thermal oxidation / nitridation

• metal & contact alloying / metallization

With precise fast ramp up and ramp down rates and an excellent temperature uniformity our devices are a high quality table top furnance which is a great addition in every laboratory. The opportunity of the usage of 4 gas lines controlled via a mass flow controller and an integrated data logging supports you to find the best process runs for your needs.