SALIX – Local Waste Gas Treatment for Chemical Wet Cleaning Processes

The SALIX product family comprises compact, high-performance systems for local waste gas treatment in chemical wet cleaning processes with high gas throughputs. The solutions are specially designed to efficiently remove water-soluble gaseous compounds such as alcohols, water-soluble solvents, acids and ammonia. They also enable the reliable separation of particles, salts and droplets from the exhaust gas stream.

Typical areas of application are single-wafer wet cleaning processes, where stable and clean exhaust air conditions are crucial. SALIX systems are designed to enable particularly long maintenance cycles of over a year, thus ensuring high system availability.

The product family includes SALIX, SALIX MINI and SALIX MICRO – tiered solutions that offer optimum performance in the smallest of spaces, depending on space requirements, process requirements and integration level.