STYRAX is DAS's high-performance product family for demanding high-volume manufacturing environments. The product family includes point-of-use burn-wet and plasma-wet systems with a particularly compact footprint.

It was developed specifically for process gases from CVD, oxide/poly/metal etching, epitaxy, GaN, MOCVD and LED manufacturing. STYRAX is characterised by high efficiency with low environmental impact and achieves excellent destruction and removal efficiency (DRE), for example > 95% for CF₄. Thanks to its high capacity for CVD gases such as H₂, SiH₄, TEOS and many more, as well as comprehensive safety measures, STYRAX protects the environment, health and equipment alike. STYRAX DUO is our standard version. Two scrubbing systems operate simultaneously. It is characterized by low water consumption through a closed-loop design.